Tuesday, July 14, 2009

A Semiconductor Quandary

UC San Diego scientists including Jacobs School research scientist Mark Tillack (above) are using laser plasma-produced light sources to explore performance improvements of critical inspection tools for the semiconductor industry, which ultimately will enable industry to pursue even better and faster chips. While optical lithography is being pushed to its limits in the semiconductor industry, there is a growing concern whether metrology tools can keep pace for creating and inspecting the new generation of devices. Read more here.

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